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在布拉格衍射的声光器件中,有时要求叉指换能器具有较大的带宽。由Chirp换能器结构可以实现较大带宽。但是,要求具有较高的工艺水平。利用常规工艺较难实现。本文提出一种新结构.利用常规光刻工艺可很容易实现。
In Bragg-diffractive acousto-optical devices, interdigital transducers are sometimes required to have a large bandwidth. By Chirp transducer structure can achieve greater bandwidth. However, it requires a higher level of technology. The use of conventional technology is more difficult to achieve. This paper presents a new structure that can be easily implemented using conventional lithography.