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在激光的实际应用中,需要利用光束整形技术将激光器的输出光束调制为期望的光强分布。微机电系统的发展为光束整形提供了一种解决方案。采用微反射镜阵列,实现了激光光束的整形。基于随机化的思想提出了相应的算法,分析了算法在不同单元数目和不同噪声水平下的表现,为实际应用提供了有价值的参考依据。最后,建立了实际的光路模型,进行了光线追迹,给出单模高斯光束以及考虑噪声情况下的仿真结果。分析结果表明,使用微反射镜阵列可以有效地实现不同输入下的激光光束整形,并且具有极大的灵活性,为光束整形提供了一种新的手段。
In the practical application of laser, it is necessary to use beam shaping technology to modulate the laser output beam to the desired intensity distribution. The development of MEMS has provided a solution for beam shaping. The use of micro-mirror array, to achieve the laser beam shaping. Based on the idea of randomization, a corresponding algorithm is proposed, and the performance of the algorithm under different cell numbers and different noise levels is analyzed, which provides a valuable reference for practical application. Finally, the actual optical path model is established, the ray tracing is performed, the single-mode Gaussian beam is given, and the simulation results considering the noise are given. The analysis results show that the micro-mirror array can effectively achieve laser beam shaping under different input, and has great flexibility, which provides a new method for beam shaping.