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研究了微波化学气相沉积中沉积气压对金刚石薄膜生长速率和质量的影响.研究表明,金刚石薄膜的生长速率随沉积气压的提高而增大,生长速率与沉积气压为线性关系.在高沉积气压下生长的金刚石薄膜晶形完整,拉曼谱测量可得到锐利的金刚石相的峰,但电压-电流测量表明,随着制备时沉积气压的提高,金刚石薄膜的暗电流增大,膜的电学质量下降.
The effects of deposition pressure on the growth rate and mass of diamond films were studied.The results show that the growth rate of diamond films increases with the increase of deposition pressure and the growth rate is linear with the deposition pressure.Under high deposition pressure The growth of the diamond film is intact and the Raman spectrum results in a sharp diamond peak. However, the voltage-current measurements show that with the increase of the deposition pressure, the dark current of the diamond film increases and the electrical quality of the film decreases.