一、概述 等离子源质谱法(ICP-MS),作为分析领域的“新秀”,在其面世后不久,立即引起了整个分析界的极大关注。这是由其“身兼二职”的独特优点所决定,即既是一种极其灵敏的元素分析仪器,又是获取同位素资料的快速手段。我们知道,等离子源质谱仪是作为离子源的常压等离子体与高真空的质谱检测系统相结合的产物。因此,该仪器的技术关键之一,就在于把此二者有效地联接起来的“接口”上。可以这样说,到目前为止,ICP-MS仪器的研制,改进和发展的过程基本上是围绕着这一中 I. INTRODUCTION Plasma-mass spectrometry (ICP-MS), a “rookie” in the area of ​​analysis, immediately caught the attention of the entire analytics community shortly after its introduction. This is determined by the unique merits of being a “second body”, namely, an extremely sensitive elemental analysis instrument and a quick means of obtaining isotopic data. We know that plasma mass spectrometry is the product of a combination of atmospheric plasma as a source of ions and a high vacuum mass spectrometry system. Therefore, one of the key technical aspects of the instrument lies in the “interface” that effectively connects the two. It can be said that so far, ICP-MS instrument development, improvement and development process is basically centered around this