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介绍了一种用于太赫兹频段的矩形波导腔的设计和加工工艺。利用Comsol Multiphysics软件对射频器件中心频率为0.4 THz时,横电波(TE10波)在矩形波导腔中的传播进行了仿真。仿真结果表明,波导口尺寸设计为0.56 mm×0.3 mm时,电磁波在该波导中的传输损耗较小,插入损耗S21接近-1 dB,回波损耗S11小于-30 dB。该结构利用牺牲层技术制备。采用SU-8环氧基负性光刻胶作为介质层,低转速多次旋涂AZ50XT形成牺牲层结构,制备出矩形波导腔结构。该波导腔结构内壁表面平整,侧壁垂直度为87.7°,上层结构和侧壁之间结合紧密,为实现波导腔结构的加工提供了一种新的途径。
A design and processing technique of rectangular waveguide cavity for terahertz band are introduced. The propagation of transverse electric wave (TE10 wave) in a rectangular waveguide cavity was simulated using Comsol Multiphysics software at a center frequency of 0.4 THz. The simulation results show that the transmission loss of the electromagnetic wave in the waveguide is small when the size of the waveguide is 0.56 mm × 0.3 mm, the insertion loss S21 is close to -1 dB, and the return loss S11 is less than -30 dB. The structure is made using sacrificial layer technology. SU-8 epoxy-based negative photoresist was used as the dielectric layer, and the sacrificial layer structure was formed by spin-coating AZ50XT at low speed several times to prepare a rectangular waveguide cavity structure. The inner wall of the waveguide cavity structure is flat with a verticality of 87.7 ° on the side wall and a tight connection between the upper structure and the side wall, providing a new way for the processing of the waveguide cavity structure.