论文部分内容阅读
利用国产MBE设备,我们研制了多种多用途的GaAs/AlGaAs器件结构材料,并制作出GaAs/AlGaAs量子阱激光器、GaAs/GaAlAs自电光效应器件(SEED)、GaAs/AlGaAs HEMT等多种器件。
Using domestic MBE equipment, we have developed a variety of multi-purpose GaAs / AlGaAs device materials and fabricated GaAs / AlGaAs quantum well lasers, GaAs / GaAlAs self-electro-optic effect devices (SEEDs), GaAs / AlGaAs HEMTs and other devices.