一般情况下,磁场与敏感器很难严格垂直或平行,这就要求敏感器对磁场的三个分量都敏感.此时,只要磁矢的绝对值达到某一定值,敏感器就会有一信号输出.为此,本文设计了一种3-D(三维)磁敏晶体管,空间分辩率为10×15×80μm~3,其结构见图1.其中集 Under normal circumstances, the magnetic field and the sensor is difficult to strictly vertical or parallel, which requires the sensor on the magnetic field of all three components are sensitive at this time, as long as the absolute value of the magnetic vector reaches a certain value, the sensor will have a signal output To this end, this paper designs a 3-D (three-dimensional) magneto-sensitive transistor, the spatial resolution of 10 × 15 × 80μm ~ 3, the structure shown in Figure 1. Set