论文部分内容阅读
ZnO nano-structural films are prepared by RF magnetron sputtering and the hydrothermal synthesis.The morphologies,crystal structures and chemical compositions of the ZnO nano-scaled films are analyzed by XRD,SEM and XPS,which show that the ZnO nanorods are well oriented along c-axis as the preparation conditions are suitably selected;and there are a lot of oxygen vacancies and adsorbed oxygen atoms in the ZnO nano-structural films,which are beneficial to be utilized as gas-sensing materials.Furthermore,SAW(Rayleigh wave and Love wave) sensors based on ZnO nano-structural films deposited on 128°YX-LiNbO_3 and 36°YX-LiTaO_3 piezoelectric substrates are fabricated and used for sensing hydrogen at room temperature.The results show that the Love wave sensors have better sensing properties,such as high sensitivities and superior performances.
ZnO nano-structural films were prepared by RF magnetron sputtering and the hydrothermal synthesis. The morphologies, crystal structures and chemical compositions of the ZnO nano-scaled films were analyzed by XRD, SEM and XPS, which show that the ZnO nanorods are well oriented along c-axis as the preparation conditions are suitably selected; and there are a lot of oxygen vacancies and adsorbed oxygen atoms in the ZnO nano-structural films, which are beneficial to be utilized as gas-sensing materials. Stillrther, SAW (Rayleigh wave and Love wave) sensors based on ZnO nano-structural films deposited on 128 ° YX-LiNbO 3 and 36 ° YX-LiTaO 3 piezoelectric substrates are fabricated and used for sensing hydrogen at room temperature. The results show that the Love wave sensors have better sensing properties, such as high sensitivities and superior performances.