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设计了一种新型F-P(Fabry-Perot)干涉腔式温度传感器,具有高灵敏度、电绝缘性及抗电磁干扰等优点,能够胜任极端恶劣环境下的温度测量。采用腔内端面的反射光数学模型,并考虑输出光功率的线性度,对F-P传感腔初始腔长H、光纤端面反射率r的选取进行了优化设计与分析。应用有限元分析软件ANSYS对传感器的理论模型进行仿真与验证,模拟结果显示,当待测温度的变化范围为0~100℃时,干涉腔腔长随温度近似于线性变化,相应的理论灵敏度为1.636 nm/℃,精度为±0.2℃。
A novel F-P (Fabry-Perot) interferometric cavity temperature sensor is designed with the advantages of high sensitivity, electrical insulation and anti-electromagnetic interference, which can be used for temperature measurement in extreme harsh environments. Using the reflected light mathematical model of cavity end face and taking into account the linearity of the output optical power, the optimal cavity length H and optical fiber end face reflectivity r of the F-P sensing cavity are optimized and designed. The finite element analysis software ANSYS was used to simulate and verify the theoretical model of the sensor. The simulation results show that when the temperature to be measured varies from 0 to 100 ℃, the length of the cavity changes linearly with temperature, and the corresponding theoretical sensitivity is 1.636 nm / ℃, accuracy of ± 0.2 ℃.