为了将有机薄膜用于半导体或集成器件中,本文研究了用离子团束方法制备聚乙饰薄膜。用透射电子显微镜(TEM)和扫描隧道显微镜(STM)分析了所制备的样品。它们具有相当好的结晶特性,其菱形晶片边长尺寸为2—20μm,通常是(001)面平行于基底表面。用离子团束技术制备的聚乙烯薄膜表面是比较平整、均匀的,杂质和缺陷较少。 In order to use organic thin films in semiconductor or integrated devices, this paper studies the preparation of polyacetal films by ion-cluster method. The prepared samples were analyzed by transmission electron microscopy (TEM) and scanning tunneling microscope (STM). They have fairly good crystallographic properties with rhombic wafer edge lengths in the range of 2-20 μm, usually with the (001) plane parallel to the substrate surface. The surface of the polyethylene film prepared by ion-beam technique is relatively flat and uniform with less impurities and defects.