在硅衬底上形成SiO_2的方法是多种多样的,人们比较熟悉的有热氧化法、硅烷热分解法和正硅酸乙脂热分解法等。我们这里谈的则是另一种新方法——旋涂SiO_2乳胶法,它是由有机氧硅烷的水解聚合物,用特殊的涂布方法在Si衬底上形成SiO_2薄膜的。近几年来人们在SiO_2乳胶中,掺入各种不同的杂质,变成扩散源,应用于器件及集成电 The method of forming SiO 2 on the silicon substrate is varied, and people are familiar with thermal oxidation method, silane thermal decomposition method and TEOS thermal decomposition method. We are talking about here is another new method - spin-coating SiO 2 latex method, which is a hydrolyzed polymer of organooxysilane, with a special coating method to form SiO 2 thin film on the Si substrate. In recent years, people in the SiO 2 latex, mixed with a variety of impurities, into a diffusion source, used in devices and integrated circuits