目前在中小型无油超高真空抽气系统中,大多采用溅射离子泵为主体系,尽管溅射离子泵具有一系列优点,如使用简便,寿命长,耗用功率小,不用水冷却,但是对活性气体抽速低,不能承受较大的放气量,故在电真空器件排气中仍要在泵内或系统中附加一只升华泵,帮助抽除大量活性气体。除此之 Currently in the small and medium-sized oil-free ultra-high vacuum pumping system, the majority of sputtering ion pump-based system, although the sputtering ion pump has a series of advantages, such as easy to use, long life, low power consumption, without water cooling, However, the active gas pumping speed is low, can not afford a larger deflated volume, so the vacuum device in the vacuum still pump or system in the addition of a sublimation pump to help remove a large amount of active gas. In addition to this