本文回顾了低温等离子体技术的现况,介绍了反应离子刻蚀在材料表面加工、清洗及SAW窄带器件调频等方面的应用.本文还对等离子体显影、阳极化、聚合及PCVD等作了简要讨论.因为低温等离子体技术具有省能、省料、污染少、设备简单等优点,其应用将日益广泛,这是一种对固体电子学有重要意义的技术. This paper reviewed the current status of low temperature plasma technology, and introduced the application of reactive ion etching in material surface processing, cleaning and SAW narrow band frequency modulation etc. In addition, the brief introduction of plasma development, anodization, polymerization and PCVD Discussion Because low temperature plasma technology has the advantages of energy saving, material saving, less pollution and simple equipment, its application will be increasingly widespread, which is a technology of great significance to solid state electronics.