信息产业已成为现代经济的先导产业,以集成电路为核心的电子元器件是信息产业的基础,硅片是集成电路最主要的基础功能材料,在信息产业发展中占有重要的地位和作用。目前世界半导体工业正开始由8英寸硅片的0.25微米技术向12英寸硅片的0.13-0.10微米技术转移,对12英寸硅片的市场 The information industry has become the leading industry in the modern economy. The electronic components with the integrated circuit as the core are the foundation of the information industry. The silicon is the most important basic functional material of the integrated circuit and plays an important role in the development of the information industry. The current world semiconductor industry is beginning to shift from 0.25-micron technology for 8-inch wafers to 0.13-0.10-micron technology for 12-inch wafers. The market for 12-inch wafers