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离子束表面改性技术在工业上具有广阔的应用前景。CG─60离子注入机充分考虑了工业应用的要求,离子源束斑大、均匀性好,带电子枪加热镀膜装置的多功能靶室容积大、功能全,多自由度靶盘及卡盘适应范围广,并带有水冷装置。机器功能完善,可进行离子注入、镀膜、反冲注入和离子束辅助沉积等多种工作。利用该设备为六十多个单位的刀具、模具、精密零件等进行了离子束表面强化和改性处理,取得了明显效果,大量实例表明被处理件的耐磨、抗蚀、耐热等性能显著提高,使用寿命提高了1~10倍。
Ion beam surface modification technology in the industry has broad application prospects. CG ─60 ion implanter fully consider the requirements of industrial applications, the ion source beam spot large, good uniformity, with electron gun heating coating device multifunctional chamber large volume, full-featured, multi-degree of freedom of the target disk and chuck to adapt to Wide, with a water-cooled device. Machine functions perfect, for ion implantation, coating, recoil injection and ion beam assisted deposition and other work. The equipment was used to strengthen and modify the surface of the ion beam for more than 60 units of tools, molds, precision parts and so on, and achieved remarkable results. A large number of examples show the wear resistance, corrosion resistance and heat resistance of the treated parts Significantly improve the service life increased by 1 to 10 times.