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本文提出了一种鉴定蓝宝石(或尖晶石)衬底上外延硅膜质量的方法.用一个F因子表征硅膜特性.该因子以吸收系数为表式并从反射光谱算出.对实验结果进行了讨论.
In this paper, a method for identifying the quality of epitaxial silicon films on sapphire (or spinel) substrates is presented. A F-factor is used to characterize the properties of the silicon film. The factors are expressed in terms of absorption coefficients and calculated from the reflectance spectra. Discuss.