由于铁电薄膜的诱人应用前景,最近几年受到人们的极大关注。铁电氧化物薄膜可望用于多种微电子学和光子学器件,如:铁电存储器,电光调制器,红外探测器,光学二次谐波发生器以及超导铁电器件等。BaTiO_3薄膜是最重要的钙钛矿结构铁电薄膜之一,它具有优良的压电,铁电,热释电和非线性光学性质。所以,很多研究组都很重视BaTiO_3薄膜的生长机理和改进薄膜性能的研究。 Due to the attractive prospect of ferroelectric thin films, great attention has been paid in recent years. Ferroelectric oxide films are expected to be used in a variety of microelectronics and photonics devices such as ferroelectric memories, electro-optic modulators, infrared detectors, optical second harmonic generators and superconducting ferroelectric devices. BaTiO_3 film is one of the most important perovskite-structure ferroelectric thin films with excellent piezoelectric, ferroelectric, pyroelectric and nonlinear optical properties. Therefore, many research groups attach great importance to the growth mechanism of BaTiO_3 thin film and improve the performance of the film.