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在板材探伤中 ,探头的有效波束宽度对探伤的速度有着直接的影响 ,采用将一对晶片分割为多对晶片的方法制作成的两种 TR探头 ,可以明显增加探头的有效波束宽度 ,从而提高检测的效率。
In plate flaw detection, the effective beamwidth of the probe has a direct impact on the speed of the flaw detection. By using two TR probes made by splitting a pair of wafers into pairs of wafers, the effective beam width of the probe can be significantly increased to improve Detection efficiency.