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本论文探索了薄膜敏感元件叉指结构电极间薄膜分布电阻的计算方法,为电阻型敏感元件的设计提供理论上的指导。叉指电极间电阻的计算不能按常规方法进行,这里采用分布电阻的计算方法,具体薄膜电阻的分割计算,借鉴了三极管中分布电阻的计算方法,把叉指电极中间的电阻分割成几个形状更加规则的电阻,在设法计算出各个分割电阻的情况下,利用这些电阻间的串并联关系,求得电极间总的电阻。
This thesis explores the calculation method of the film distribution resistance between the electrodes in the interdigital sensor of the film sensor and provides the theoretical guidance for the design of the resistance sensor. Interdigital resistance calculation between the electrodes can not be carried out by conventional methods, the use of distributed resistance calculation method, the specific calculation of the thin-film resistor calculation, drawing on the calculation of the distribution resistor in the transistor, the interdigital electrodes in the middle of the resistance is divided into several shapes More regular resistance, in trying to calculate the case of each split resistance, the use of these resistors in series between the parallel relationship between the total resistance between the electrodes.