Pd-MOS PET是一种氢气检测器件.它具有高灵敏度、高选择性、快响应速度和较好的稳定性.1975年瑞典I.Lundstr(o|¨)m等人研制出第一只 Pd-MOS FET.此种器件的工作机理为:当氢分子吸附在催化金属Pd上时,氢分子分解.氢原子通过Pd栅并吸附在金属-氧化物界面上形成偶极层.这偶极层使Pd栅MOS FET的阈值电压 V_T发生漂移.由于反应的可逆性以及氢通过Pd栅的扩散迅速,使得这一电压漂移可作为氢气浓度的测量。 Pd-MOS PET is a hydrogen detection device with high sensitivity, high selectivity, fast response and good stability. In 1975 Sweden I. Lundstr (o | ¨) m and others developed the first Pd -MOS FET. The working mechanism of this device is that when the hydrogen molecule is adsorbed on the catalytic metal Pd, the hydrogen molecules are decomposed and the hydrogen atoms pass through the Pd gate and are adsorbed on the metal-oxide interface to form a dipole layer Drift the threshold voltage V_T of the Pd gate MOS FET This voltage drift can be used as a measure of the hydrogen concentration due to the reversibility of the reaction and the rapid diffusion of hydrogen through the Pd gate.