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叙述了同轴源原子氧模拟装置的基本工作原理和装置的各组成单元及其功能；介绍了装置性能的测量方法及结果。结果表明：装置产生的原子氧能量可以控制在５ｅＶ～１０ｅＶ；原子氧的束流强度约为４×１０１５个／ｃｍ２·ｓ；原子氧束中氧离子的含量小于０．１％。
Describes the basic working principle of coaxial source atomic oxygen simulator and the components of the device and their functions. The measuring method and result of device performance are introduced. The results show that the atomic oxygen energy generated by the device can be controlled at 5eV ~ 10eV, the beam current of atomic oxygen is about 4 × 1015 atoms / cm2 · s, and the content of oxygen ions in atomic oxygen is less than 0.1%.