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5. Ion Beam Post-treatment Induced changes in DLC Thin Films Prepared by Unbalanced Magnetron Sputterin

Ion Beam Post-treatment Induced changes in DLC Thin Films Prepared by Unbalanced Magnetron Sputterin

来源 :The 11th International Workshop on Plasma-Based Ion Implanta | 被引量 : 0次 | 上传用户：oyocean1

【作 者】

：

Chao Wang Yingxu e Xi Qian Mi Junqi Xu Lingxia Hang 

【机 构】

：

Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory, School of Optoelectronic

【出 处】

：

The 11th International Workshop on Plasma-Based Ion Implanta

【发表日期】

：

2011年3期

【关键词】

：

DLC Ion post-treatment unbalanced magnetron sputtering (UBMS) Optical properties 

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