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采用PECVD方法制备Fe2O3／SnO2双层气敏薄膜，利用浸渍方法对稀土元素（La，Nd，Sm，Er，Yb）与铝配制的乳浊液进行表面修饰．测试结果表明，修饰后的双层薄膜对乙醇或丙酮具有较高的灵敏度与选择性。
Fe2O3 / SnO2 bilayer gas-sensing films were prepared by PECVD method, and the surface modification of rare earth elements (La, Nd, Sm, Er, Yb) and aluminum emulsion were performed by impregnation method. The test results show that the modified double-layer film has high sensitivity and selectivity to ethanol or acetone.