论文部分内容阅读
本文在总结通过改善设备状况及操作环境而提高产品质量的经验基础上,经分析提出了半导体器件生产过程中的所谓“闭环控制生产”的概念,从一个新的角度去认识器件的研制和生产过程。
Based on the experience of improving the product quality by improving equipment condition and operating environment, this paper puts forward the concept of “closed-loop control production” in the process of semiconductor device production from a new perspective to understand the device development and production process.