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提出了一种新型的超低功耗读出电路用于18 μm中心距1 024×1 024面阵规模的AlGaN紫外焦平面.为了实现低功耗设计紫外焦平面读出电路,采用了三种设计方法,包括:电容反馈跨阻放大器CTIA结构采用工作在亚阈值区的单端输入运算放大器,列像素源随缓冲器和电平移位电路共用同一个电流源负载以及列级缓冲器的分时尾电流源设计.由于像素单元内CTIA采用了单端输入运算放大器,在3.3 V供电电压下,每个像素单元最小工作电流仅8.5nA.该读出电路设计了可调偏置电流电路使读出电路能得到更好的性能并基于SMIC 0.18 μm 1P6M混合信号工艺平台进行了设计制造.测试结果表明:由于采用了上述设计方法,整个芯片的功耗在2 MHz时钟8路输出模式下仅67.3 mW.“,”A novel ultra-low-power readout integrated circuit (ROIC) for 1 024× 1 024 ultraviolet (UV) AlGaN focal plane arrays (FPA) with 18 μm-pitch was presented.In order to optimize power consumption for UVFPA readout circuit these methods were adopted,which including single-terminal amplifier under subthreshold region as CTIA amplifier,common current source load for source follow (SF) buffer in column pixels and level shift circuits,and time-sharing tail current source for column buffer.The smallest operational current of CTIA in pixel unit is only 8.5 nA with 3.3 V power supply by using single-terminal amplifier.The ROIC has been fabricated in SMIC 0.18 μm 1P6M mixed signal process and also achieved better performances with the novel design of bias current adjustable.Furthermore,the overall power consumption of the chip is 67.3 mW at 2 MHz in 8-outputs mode by the above methods according to the experimental results.