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本文通过建立多孔氧化铝(porous alumina,PA)的物理模型及理论分析,提出与发展了一种基于PA和单原子沉积(atomic layer deposition,ALD)技术的颜色调控新方法.以实验制备的PA样品为原型,对孔径相同、孔中心距相同但孔深不同的一系列PA模板进行了颜色调控的仿真,揭示了调控色随孔深变化的规律;通过控制在草酸溶液中的阳极氧化时间,实验制备出平均孔径40nm、平均孔中心距100nm、孔深分别为296nm和373nm的两个PA样品;之后采用ALD技术在它们表面均沉积一层膜厚为16.8nm的Fe2O3薄膜;在白光照射下,可观察到这两个经ALD沉积后的PA样品呈现出不同的颜色.实验中得到的实际调控色,与理论仿真结果相符合,从而证明了这一颜色调控方法的可行性.
In this paper, a new color regulation method based on PA and atomic layer deposition (ALD) technology is proposed and developed by means of physical model and theoretical analysis of porous alumina (PA) .According to experimentally prepared PA The samples were used as prototypes to simulate the color control of a series of PA templates with the same hole diameter and the same hole center distance but different hole depths. The rules of the control color changing with the hole depth were revealed. By controlling the anodic oxidation time in oxalic acid solution, Two PA samples with an average pore diameter of 40 nm, an average hole center distance of 100 nm and a hole depth of 296 nm and 373 nm were prepared. Then, a film of Fe2O3 with a film thickness of 16.8 nm was deposited on the surface of the film by using the ALD technique. , It can be observed that the two PA samples deposited by ALD show different colors.The actual control color obtained in the experiment accords with the theoretical simulation results to prove the feasibility of this color control method.