一、引言 高温氧化物超导材料一出现,科学家们就注意将它制成薄膜材料、以此迈向实用化。利用高温氧化物超导材料制造超导量子干涉探测器,高速微芯片,红外探测器、高温超导晶体管等是各国科学家应用开发的重要领域,其他如超导混频器、超导天线等可用于通信、军事等领域具有广阔的前途。已经发展了许多方法制备高温超导薄膜,诸如DC或RF磁控溅射、 I. INTRODUCTION As soon as the high temperature oxide superconducting material emerges, the scientists pay attention to making it into thin film material, thus turning it into practical use. The use of high temperature oxide superconducting materials to manufacture superconducting quantum interference detectors, high-speed microchip, infrared detectors, high temperature superconducting transistors and other scientists in various countries is an important area of ​​application development, such as superconducting mixers, superconducting antennas available In communications, military and other fields have a bright future. Many methods have been developed to produce high temperature superconducting thin films, such as DC or RF magnetron sputtering,