报告了用一种新型的过滤筒来去除在微电子工业中用于漂洗硅片的去离子水中的胶体物质的实验研究结果。这种新型过滤筒是用传统的褶状筒做成的,在它周围插入一薄层阳、阴离子微型树脂,称之谓大孔树脂。 这种微型树脂和过滤器在同一个筒中的组合可以使用户获得传统过滤器无法达到的过滤量和水质。 Reported the results of an experimental study using a novel filter cartridge to remove colloidal materials from deionized water used to rinse wafers in the microelectronics industry. This new filter cartridge is made of a traditional pleated tube with a thin layer of cationic, anionic micro-resin around it called the macroporous resin. This combination of micro resin and filter in the same cartridge gives the user the filtration and water quality that conventional filters can not achieve.