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统计过程控制(statistic process control,SPC)是一种科学有效的方法,该技术的应用改变了以往靠经验来进行调整生产的模式。以M IM电容为例,首先通过对电容容值数据连续采集,进行定量的数理统计分析,评估该工艺的工艺控制能力。然后绘制控制图,对工艺进行监控。通过分析控制图,最终对工艺过程的能力水平以及是否处于统计受控状态作出定量结论。在工艺过程中当发现统计数据异常时,及时采取纠正措施,使工艺状态始终受控。通过运用SPC技术对数据进行分析,能有效改进工艺,提高产品质量。
Statistic process control (SPC) is a scientifically valid method, and the application of this technique changes the mode of adjusting production by experience in the past. Taking M IM capacitor as an example, firstly, by quantitatively collecting and analyzing the capacitance value data quantitatively, the process control ability of the process is evaluated. Then draw control charts to monitor the process. Through the analysis of the control chart, the final conclusion of the quantitative level of the ability of the process and whether it is in a statistically controlled state to make quantitative conclusions. In the process of finding abnormal statistical data, take timely corrective measures, the process state is always controlled. Through the use of SPC technology for data analysis, can effectively improve the technology and improve product quality.