论文部分内容阅读
采用开关电容技术的Boxcar(时域平均)积分原理设计,为测量电容式压力传感器的微电容的接口电路已提出。它由Boxcar积分器,锁存器,脉冲宽度调制器和控制信号电路组成。该接口电路,采用3μm P-阱CMOS双层多晶硅栅工艺研制,管芯面积为2.5mm×3.5mm.测试结果表明,接口电路具有较好的灵敏度,它能将硅集成电容式压力(加速度)传感器集成在同一芯片上,实现一体化。
The Boxcar (Time Domain Average) integral principle design using switched capacitor technology has been proposed as an interface circuit to measure the micro-capacitance of capacitive pressure sensors. It consists of Boxcar integrators, latches, pulse width modulator and control signal circuits. The interface circuit, developed by using 3μm P-well CMOS double-layer polysilicon gate technology, has a die area of 2.5mm × 3.5mm.The test results show that the interface circuit has good sensitivity, which can integrate silicon integrated capacitive pressure (acceleration) Sensors integrated in the same chip, to achieve integration.