一 前言: 随着集成电路向大规模、高速化、微细化方向的发展,对生产工艺的监控、检测也日益显得重要了。硅栅CMOS集成电路的工序较多,任何一个环节出了差错,都会直接影响到芯片的合格率和电路的性能。生产部门为了弄清一个问题,常常要逐道工序检查,而且很难得到定量的结论,既浪费时间,又影响生产。微电子监控, A preamble: With the integrated circuits to large-scale, high-speed, miniaturization of the direction of the monitoring of the production process, testing is also increasingly important. Silicon gate CMOS integrated circuits more processes, any part of an error, will directly affect the chip pass rate and circuit performance. In order to clarify a problem, the production department often inspects each process step by step, and it is difficult to obtain quantitative conclusions, which is a waste of time and affects production. Microelectronics monitoring,