论文部分内容阅读
本文介绍了压电薄膜检测的激光超声系统对ＣＶＤ金刚石膜声速测量的原理及方法。利用反射回波法对二块金刚石膜试样的纵波声速的测量结果为（２．０１０±０．０１４）×１０４ｍ／ｓ，证实了ＣＶＤ金刚石膜的高声速特性。
In this paper, the principle and method of measuring the acoustic velocity of CVD diamond film by the piezoelectric ultrasonic laser system are introduced. The measurement of the longitudinal wave velocity of the two diamond films by reflection echo method was (2.010 ± 0.014) × 104 m / s, confirming the high sound velocity characteristics of the CVD diamond films.