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用燃烧火焰法在 TC4 Ti 合金和单晶 Si(001)面上沉积了金刚石薄膜。对合成的膜进行了扫描电镜、激光喇曼光谱分析。结果表明,金刚石薄膜的结构和形貌强烈取决于沉积温度、O_2/C_2H_2流量比等工艺参数。研究了衬底表面预处理对金刚石薄膜形核及长大的影响,并对表面预处理影响形核的原因进行了初步探讨。
Diamond films were deposited on TC4 Ti alloy and monocrystalline Si (001) surfaces by the combustion flame method. The synthesized films were analyzed by scanning electron microscopy and laser Raman spectroscopy. The results show that the structure and morphology of the diamond thin film strongly depend on the deposition temperature, O 2 / C 2 H 2 flow ratio and other process parameters. The effects of substrate surface pretreatment on the nucleation and growth of diamond films were investigated. The reasons for the effect of surface pretreatment on nucleation were also discussed.