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用EBIC法分析了LED列阵显示器失效的工艺原因,非破坏地测量了最佳样管的p-n结结深,其数值与磨角染色法及最佳结深理论计算值一致。
The EBIC method was used to analyze the technological causes of the failure of the LED array display. The p-n junction depth of the best sample tube was measured non-destructively. The numerical results were in good agreement with the results of the grinding angle method and the optimal junction depth.