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AMS——AdaptableManufacturingSystem适应性生产系统ARPA——AdvancedResearchProjectsAgency预研规划局AVP。AdvancedVacuumProcessor高级（先进的）真空处理器BSSS。BackSideScattersensor背面散射探测器（传感器）CEM——CommonEqulpmenZModel公用设备模型CFM——Contamina
AMS - Adaptable Manufacturing System Adaptable Manufacturing System ARPA - Advanced Research Projects. AdvancedVacuumProcessor Advanced (Advanced) Vacuum Processor BSSS. BackSideScattersensor Backscatter Detector (Sensor) CEM - CommonEqulpmenZModel Utility Model CFM - Contamina