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结合Ｓｉ体微机械技术和电镀技术加工出Ｆｅ－Ｎｉ／Ｃｕ／Ｓｉ复合悬臂梁，其中Ｆｅ－Ｎｉ膜厚３μｍ，Ｃｕ膜厚０．２μｍ．利用共振法首次测出在１．３Ｐａ气压下，复合悬臂梁中Ｆｅ－Ｎｉ（Ｆｅ６４，Ｎｉ３６；质量分数，％，下同）电镀沉积膜的内耗为１０－３．利用自行设计的微力／微位移天平法，测出Ｆｅ－Ｎｉ（Ｆｅ ５７， Ｎｉ ４３）／Ｃｕ／Ｓｉ复合悬臂梁的Ｙｏｕｎｇ’ｓ模量为１．０×１０１１Ｎ／ｍ２．Ｆｅ－Ｎｉ电镀沉积膜的内应力随膜中Ｆｅ含量的增加先是增大然后减小．在Ｉｎｖａｒ合金（Ｆｅ６４，Ｎｉ３６）成分附近达到最大约 ３００ ＭＰａ．Ｆｅ－Ｎｉ电镀膜的热膨胀系数与膜中Ｆｅ含量关系则与内应力相反，但与合金体材料变化趋势一致，在Ｉｎｖａｒ合金成分附近达到最小，其值高于相应成分的合金体材料，约６×１０－６／℃。
Fe-Ni / Cu / Si composite cantilever was fabricated by Si bulk micromachining technology and electroplating technology. The thickness of Fe-Ni film was 3μm and the thickness of Cu film was 0.2μm. The resonance method was first measured at 1.3Pa pressure, the composite cantilever Fe-Ni (Fe64, Ni36; mass fraction, the same below) deposited film with an internal friction of 10-3. The Young’s modulus of the Fe-Ni (Fe 57, Ni 43) / Cu / Si composite cantilever was measured to be 1.0 × 10 11 N / m 2 using a self-designed micro / micro displacement scale method. The internal stress of Fe-Ni electroplating deposited films increases and then decreases with the increase of Fe content in the films. Up to about 300 MPa near the composition of Invar alloy (Fe64, Ni36). The thermal expansion coefficient of the Fe-Ni plating film is inversely proportional to the internal stress, but it is in agreement with the change tendency of the alloy material, reaching the minimum around the composition of the Invar alloy, which is higher than that of the alloy material of the corresponding composition, and about 6 × 10-6 / ° C.