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介绍了一种利用新型发光二极管外延片光致发光光谱在线检测仪对 Ga P发光二极管外延片进行在线无损检测和质量控制的方法 .通过对检测结果的统计分析 ,得出了对生产工艺的改进意见 .最终实现了提高 Ga P外延片质量的目的
A new method for on-line non-destructive inspection and quality control of Ga P LED epitaxial wafers by using a new LED epitaxial wafer photoluminescence spectrum on-line detector is introduced.According to the statistical analysis of the test results, the improvement on the production process is obtained The final realization of the Ga P epitaxial wafer quality purposes