一、碳氟化合物检漏法本讲义第一册曾经讲过,对全密封的电真空器件、微电子器件、半导体管以及空心球等的检漏,通常采用氦质谱检漏仪背压检漏法或放射性同位素背压检漏法作为精检手段;然而它们只能在一定的漏率范围内才是有效的,并且都受到了最小可检漏率与最大可检漏率范围的限制。即使成功地进行了上述两种方法的任一种方法,对最大可检漏率范围之外的大漏还 First, the fluorocarbon leak detection method The first volume of this lecture once said that the sealed leak of electric vacuum devices, microelectronic devices, semiconductor tubes and hollow spheres, etc., usually using helium mass spectrometer leak detector back-pressure leak detection Law or radioisotope back-pressure leak detection method as a means of detection; however, they can only be effective within a certain leakage rate range, and are subject to the minimum leak rate and the maximum leak rate range limit. Even if either of the above two methods is successfully performed, the large leakback beyond the maximum leak detectable range