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一、偏振干涉仪法的测量原理传感器的检定是将传感器的测杆与干涉仪的可动镜接触,将由干涉仪测得的可动镜实际移动的距离与由传感器测得的移动距离比较,就得到传感器的示值误差。因此,检定装置的关键是其精度和分辨率高于传感器的干涉仪。干涉仪的光路图见图1,从激光器发出的线偏振光与偏振分光镜的水平轴成45°角的方向入射,经偏振分光镜分成S光和P光,分别经参考镜和可动镜反射后,再次在偏振分光镜处会
First, the measuring principle of polarization interferometry The sensor is the test of the sensor rod and the interferometer of the movable mirror contact will be measured by the interferometer and the actual movement of the movable mirror distance measured by the sensor to compare the distance, Get the indication error of the sensor. Therefore, the key to the verification device is its interferometer with higher accuracy and resolution than the sensor. The optical path of the interferometer is shown in Fig.1. The linearly polarized light emitted from the laser is incident on the horizontal axis of the polarization beam splitter at an angle of 45 °. The polarization beam splitter splits the light into S-light and P-light, and passes through the reference mirror and the movable mirror After reflection, again at the polarizing beam splitter will be