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近年来,光学工业、半导体工业、电子工业等对零部件的制造精度要求越来越高,已逐步接近10~(-8)～10~(-9)m数量级。为了实现精密加工,对机床的回转精度和直线运动精度要求也日益提高。与此同时,对加工零部件的测量精度和测量仪器提出了更高的要求。在提高精密主轴轴系的回转精度方面,不仅要求主轴的静态精度高,而且要求动态精度也要高,在金刚刀切削或砂轮磨削和动态测量时,要保持工作状态下良好的回转精度。因此,对轴系零部件的刚度、热稳定性、
In recent years, optical manufacturing, semiconductor industry, electronics industry and other parts of the manufacturing accuracy requirements are getting higher and higher, has been gradually close to 10 ~ (-8) ~ 10 ~ (-9) m order of magnitude. In order to achieve precision machining, the accuracy of the rotary machine tool and linear motion accuracy is also increasing. At the same time, the processing of parts of the measurement accuracy and measuring instruments put forward higher requirements. In terms of improving the precision of the rotation of the precision spindle shaft system, not only the static precision of the spindle shaft is required but also the dynamic precision is also high. In the diamond cutting or grinding and dynamic measurement of the grinding wheel, good rotation accuracy is maintained. Therefore, the rigidity of shaft components, thermal stability,