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系统研究了熔石英激光损伤修复后的形貌特征,根据测量数据建立了典型的损伤修复坑三维模型,利用标量衍射理论并结合快速傅里叶变换算法研究了修复坑在351 nm激光辐照下游光场调制的分布规律.研究表明,修复坑引起的光场调制会使得下游不同距离位置处出现环形光场增强区和轴上位置光场增强点;环形光场增强区位置距离修复元件较近,其环形调制极大值主要受修复坑深度的影响,且随修复坑深度的增大而逐渐增加;轴上位置光场增强点位置距离修复元件较远,其轴上调制极大值主要受修复坑边缘凸起高度的影响,且随凸起高度的增大而快速增加;环形调制极大值或轴上调制极大值增大的同时,其分布位置与修复元件之间的距离均会逐渐减小.实验验证表明,利用三维修复坑模型得到的下游光场调制数值模拟结果与实验测量结果具有较好的一致性.本研究结果对控制熔石英元件损伤修复形貌特征以抑制调制增强效应给出了具体的控制方向,对修复工艺的改进与完善提供了非常有意义的参考.
The morphological characteristics of fused quartz after laser damage repair were systematically studied. A typical three-dimensional model of damage repair pit was established based on the measured data. Using scalar diffraction theory and Fast Fourier Transform algorithm, the effects of 351 nm laser irradiation The results show that the modulation of the light field caused by the repair pit will make the annular light field enhancement region and the axial light field enhancement point appear at different distances from the downstream. The position of the annular light field enhancement region is closer to the restoration component , The maximum value of the ring modulation is mainly affected by the depth of the repaired pit and gradually increases with the depth of the repaired pit. The position of the enhanced point of the optical field at the axial location is far away from the restorative component, Repair the impact of the height of the raised edge of the pit and increase rapidly with the height of the bulge; while the maximum value of the ring modulation or the maximum on-axis modulation increases, the distance between the distribution position and the repaired element will be Gradually decrease.The experimental results show that the numerical simulation results of downstream optical field modulation obtained by using the three-dimensional repair pit model have good agreement with the experimental measurement results.The results of this study Fused silica to control morphology of repair enhancement effect to suppress the modulation control given a specific direction, the improvement and perfection repair process provides a very meaningful reference.