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气体介质稳定体放电是放电激励气体激光器高效输出的基础和前提,预电离是实现高压气体介质稳定体放电的有效技术途径之一。基于放电激励脉冲HF激光器电气结构总体设计要求设计了结构紧凑的紫外光自动预电离装置,并对其在气体介质中预电离产生的初始电子数密度进行了数值模拟。模拟结果表明:在整个放电区域内初始电子数密度均在109/cm~3左右,满足介质体放电要求。通过激光器能量输出实验评估了预电离效果,对SF6和H2混合气体介质,在充电电压较低时,输出能量有数倍的提高;对SF6和C2H6混合气体介质,在充电电压20 kV时激光器输出能量由200 mJ提高至297 mJ,提高了近50%。实验结果表明:该预电离装置对改善激光器能量输出特性有明显效果。
Gas medium discharge is the basis and precondition for high efficiency discharge of gas excited gas laser. Pre-ionization is one of the effective techniques to realize the discharge of high-pressure gaseous medium. A compact structure of UV pre-ionization device is designed based on the design requirements of the electrical structure of the discharge excited pulsed HF laser. The initial electron density generated by the preionization in the gas medium is numerically simulated. The simulation results show that the initial electron density in the entire discharge area is about 109 / cm ~ 3, to meet the medium discharge requirements. The pre-ionization effect was evaluated by laser energy output experiment. The output energy increased several times in SF6 and H2 mixed gas media at low charging voltage. For SF6 and C2H6 mixed gas media, the laser output Energy increased from 200 mJ to 297 mJ, an increase of nearly 50%. The experimental results show that the pre-ionization device has a significant effect on improving the energy output characteristics of the laser.