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引言随着电子工业的发展,人们将印刷工业中制造印刷版的技术加以改进,移植到半导体的生产中成为光刻技术。光刻的目的就是在被加工物的表面上刻出与照相图案完全一致的几何图形或零件。我们将此技术加以改进用于微波器件的制造工艺中,用来制造微型零件或用机械加工及电加工方法难以制造的零件。
INTRODUCTION With the development of the electronics industry, people have improved the technology for making printing plates in the printing industry and transplanted them into the production of semiconductors to become lithography. The purpose of lithography is to inscribe the surface of the object to be machined and the photographic pattern exactly the same geometry or parts. We have improved this technology for use in the manufacturing of microwave devices to make miniature parts or parts that are difficult to manufacture using machining and electrical machining methods.