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考虑有滞留时间约束的单臂集束型装备调度模型和可调度性问题,建立了包括单臂机械手和加工模块时序约束关系的混合整数规划模型,并从理论上证明了并行模块等价加工时间的合理性。在此模型基础上,分析了单臂机械手和加工模块的周期性加工和搬运晶圆过程,证明了集束型装备可调度性的条件。对模型和可调度性条件进行了仿真实验分析,结果表明模型有效且可行。
Considering the scheduling model and schedulability problems of single-arm cluster equipment with constraint of dwell time, a mixed integer programming model including the timing constraints of single-arm robot and processing module is established, and the equivalent processing time of the parallel module is theoretically proved rationality. On the basis of this model, the processing and processing of single-arm manipulator and processing module were analyzed periodically, and the condition of the schedulability of cluster-based equipment was proved. Simulation and analysis of the model and the schedulability conditions show that the model is effective and feasible.