熔石英光学元件表面损伤修复点周围的烧蚀碎片是诱导元件损伤的一个主要因素。根据烧蚀程度将修复点周围的烧蚀物质分为两类,然后针对不同类型的烧蚀采取大光斑CO2激光钝化和氢氟酸缓冲溶液刻蚀清洗两种方法对其进行去除处理,并且得到具体的优化处理参数。实验结果表明,两种方法都可以有效地去除修复点周围的烧蚀碎片,达到有效提升修复点抗激光损伤能力的目的。 Abrasive debris around the fused-silica optical surface damage repair point is a major contributor to damage to the component. According to the degree of ablation, the ablative substances around the repaired point are divided into two types. Then, CO2 laser passivation with large light spot and etching and cleaning with hydrofluoric acid buffer solution are adopted for different types of ablation. Get the specific optimization parameters. The experimental results show that the two methods can effectively remove the ablation fragments around the repair point, so as to effectively improve the ability of the repair point to resist laser damage.