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本文报导国际上研制的第一台在纳米测量中，在中等测量范围内，具有微型光纤传导激光干涉三维测量系统、可自校准和进行绝对测量的计量型原子力显微镜。它的诞生，可使目前用于纳米技术研究的扫描隧道显微镜定量化，并将其所测量的纳米量值直接与米定义相衔接。使人们更加准确地了解纳米范围内的各种物理现象，并对它们进行更精确的分析。文章对计量型原子力显微镜进行了理论分析，提出了对各种测量误差的抑制及其补偿方法，并进行了大量的实验，得到良好的结果。目前，该计量型原子力显微镜在其测量范围内，任意两点间距离的测量不确定度为Ｕ９５＝５ｎｍ＋２×１０－４ｌ；在ｚ－轴上的测量不确定度为Ｕ９５＝（１．１～１．２ｎｍ）＋２×１０－４ｈ。
This article reports the first internationally developed metrology AFM with nanometer measurement, medium measurement range, micro fiber-guided laser interference 3D measurement system, self-calibration and absolute measurement. It was born to quantify the scanning tunneling microscopy currently used in nanotechnology research and connect its measured nanometric quantities directly to the meter definition. Make people more accurately understand various physical phenomenon in the nanometer range, and carry on more accurate analysis to them. In this paper, the theoretical analysis of metrological AFM has been carried out, and various methods of measurement error reduction and compensation have been put forward. A great deal of experiments have been carried out and good results have been obtained. At present, the measurement uncertainty of measurement distance between any two points within the measuring range of the AFM is U95 = 5nm + 2 × 10-4l; the measurement uncertainty on the z-axis is U95 = (1.1 ~ 1.2 nm) + 2 × 10 -4 h.