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为控制FTIR光谱仪中迈克尔逊干涉仪的动镜做一维的精密直线运动,研究了一种低耦合位移的动镜支撑机构。利用单平行和双平行四杆机构的优点,基于柔性铰链设计了一种动镜支撑机构。根据材料力学及机构动力学理论,对基于压电陶瓷(PZT)驱动器驱动的动镜支撑机构系统的静、动态性能进行了分析。仿真结果表明,低耦合位移动镜支撑机构在外力对称作用时无垂直耦合位移,在外力偏移1 mm非对称作用时其耦合转角的数量级(以度为单位)为10-6;在输出相同位移时,动镜机构的最大应力约为双平行四杆机构的0.5倍;动镜机构的基频f为211.3 Hz,PZT驱动器和动镜机构构成的机电系统的固有频率fn为823.7 Hz,fn约为f的4倍,满足动镜支撑机构系统的动态性能要求。该研究为后续的进一步研究打下了基础,具有一定的工程价值及理论指导意义。
In order to control one-dimensional precise linear motion of the Michelson interferometer moving mirror in the FTIR spectrometer, a moving mirror supporting mechanism with low coupling displacement was studied. By using the advantages of single parallel and double parallel four bar mechanism, a moving mirror supporting mechanism is designed based on flexible hinge. According to the theory of material mechanics and mechanism dynamics, the static and dynamic performance of moving mirror support mechanism system based on PZT actuator is analyzed. The simulation results show that the low coupling displacement mirror supporting mechanism has no vertical coupling displacement when the external force is symmetrical, and the order of the coupling rotation angle (in degrees) is 10-6 when the external force is asymmetrically displaced by 1 mm. When the output is the same The maximum stress of the moving mirror mechanism is about 0.5 times that of the double parallel four bar mechanism. The fundamental frequency f of the moving mirror mechanism is 211.3 Hz. The natural frequency fn of the electromechanical system composed of the PZT driver and the moving mirror mechanism is 823.7 Hz. Fn About 4 times f, to meet the dynamic performance requirements of moving mirror support system. The research laid the foundation for further research and has certain engineering value and theoretical guidance.