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一、前言文献〔1〕作者首先利用钛锆混合氧化物作为三层增透膜中间高折射率材料镀制增透膜,并指出,这种材料有利于形成均匀性膜,能有效地消除ZrO_2膜折射率的“负”向非均匀性,增透膜的光学质量和工艺重复性较好。文献〔2、3〕介绍了利用重量比为1∶1的钛锆混合氧化物、文献〔4〕介绍了利用氧化锆、氧化钛克分子比为5∶1的混合氧化物作为高折射率材料制备激光硬膜反射镜,反射率优于99.8％。同时
First, the preamble [1] The author first use of titanium-zirconium mixed oxide as the middle of three layers of antireflection coating material made of high refractive index AR coatings, and pointed out that this material is conducive to the formation of uniform film can effectively eliminate ZrO2 The “negative” non-uniformity of the refractive index of the film, the optical quality of the AR film, and the reproducibility of the process are good. The literature [2, 3] describes the use of titanium-zirconium mixed oxide in a weight ratio of 1: 1. Reference [4] describes the use of a mixed oxide of zirconium oxide and titanium oxide with a molar ratio of 5: 1 as a high refractive index material Preparation of laser dural reflectors, reflectance better than 99.8%. Simultaneously