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本文叙述了微机控制的、用电子束扫描小孔的电子束能量密度分布的直接测量方法。该装置采用DMA双通道的数据采集系统,使用2MHz时钟的微机和2个5μs转换时间的A/D转换器,数据采集速率达400kHz。采集的数据经数据处理后,获得电子束能量密度分布的立体图和等位面曲线。为电子枪性能的评定,研究电子光学系统的理论计算与实际的差异和研究电子束的加工工艺性,提供了准确有效的手段。
This paper describes a direct measurement method of electron beam energy density distribution controlled by a microcomputer and scanned by electron beam. The device uses DMA dual channel data acquisition system, the use of 2MHz clock computer and two 5μs conversion time A / D converter, data acquisition rate of 400kHz. Data collected by the data processing, access to electron beam energy density distribution of the perspective and the equipotential curve. In order to evaluate the performance of the electron gun, the theoretical calculation and the actual difference of the electron optical system are studied, and the processing technology of the electron beam is studied to provide an accurate and effective method.