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首先简短地叙述了双端固支平行板静电执行器存在的倾斜问题,该问题会降低其可靠性并且减少其行程,从而限制它的应用范围。为了克服这个问题和提升该类执行器的性能,提出了一种新型的防倾斜MEMS平行板静电执行器结构,在实现防倾斜作用的同时获得了较大的行程。设计时对上极板的对称S型梁结构和分离的下电极结构进行了理论计算和仿真分析。基于商业表面微细加工工艺PolyMUMPs加工了样品并利用白光干涉仪进行了实验测试。该执行器可得到1.92μm的行程且不会发生倾斜,特别适合应用于微变形镜器件。
First of all, a brief description of the tilt problem of double-ended fixed-plate electrostatic actuator will reduce the reliability and reduce its stroke, which limits its application. In order to overcome this problem and improve the performance of this kind of actuator, a new anti-tilting MEMS parallel plate electrostatic actuator structure is proposed, which achieves a large stroke while achieving the anti-tilting effect. The design and simulation analysis of the symmetrical S-beam structure and the separated lower electrode structure of the upper plate are carried out. PolyMUMPs based on commercial surface micromachining process samples and tested them using a white-light interferometer. The actuator achieves a 1.92μm stroke with no tilt, making it particularly suitable for use with micro-deformable mirror devices.